Trifluoromethane(CHF3 )

Specifications
- CAS No.: 75-46-7
- UN No.: 1984
- EINECS No.: 200-872-4
- Molecular Weight: 70.01 g/mol
- Appearance: Colorless
- Melting Point: -160 ℃
- Boiling Point: -84℃
- Density: 1.246kg/m³
- Hazard Class (DOT): 2.2 & 8
- Label: Non-flammable Gas
High-purity trifluoromethane (CHF₃) gas supplied from China for semiconductor manufacturing, refrigeration, and specialty applications.
High-purity trifluoromethane (CHF₃ ) for semiconductor etching, cleaning processes, refrigerant blends, and chemical synthesis.
Trifluoromethane is a colorless, odorless, non-flammable, and chemically stable liquefied gas at room temperature. As a hydrofluorocarbon (HFC), it is soluble in water, ethanol, and acetone, but insoluble in glycol and glycerol. CHF₃ serves as a specialized etching and cleaning gas in semiconductor manufacturing, a component in low-temperature refrigerant blends, and a chemical intermediate in various organic synthesis reactions. It is also used in plasma processing and as a fire extinguishing agent, typically transported as a liquefied compressed gas.
Global Shipping & Export Compliance
Trifluoromethane (UN 1984) is classified as a non-flammable compressed gas and must be handled under strict hazardous materials regulations.
- Sea freight (FCL / LCL) – standard export method
- Air freight – available with regulatory compliance
Required Export Documents
- Material Safety Data Sheet (MSDS)
- Certificate of Analysis (COA)
- Dangerous Goods Declaration (DGD)
- UN-certified cylinder documentation
- Commercial invoice & packing list
How to Order Trifluoromethane Gas from China
- Send technical requirements (purity, cylinder specification, application)
- Receive quotation (EXW / FOB / CIF options)
- Confirm cylinder specification & compliance
- Review COA, MSDS, and certification documents
- Production, filling, and quality inspection
- Hazardous goods shipping arrangement
- Delivery and final inspection at destination
Common Mistakes When Buying Trifluoromethane Gas
- Choosing suppliers only based on lowest price
- Ignoring cylinder certification and pressure rating
- Not verifying moisture and impurity levels
- Skipping third-party inspection before shipment
- Overlooking export documentation compliance
Packaging
| Cylinder Capacity | Valve | Weight |
|---|---|---|
| 40L | XF-4 | 30 kgs |
Industrial Grade Trifluoromethane(CHF3 ) 99.9%
| Specification | 99.9% |
|---|---|
| Moisture | ≤ 2 ppm |
| Acidity (as HF) | ≤0.1 mg/kg |
| Reside on evaporation | ≤0.01 % |
| Foul gas in air phase | ≤0.1 % |
| Carbon Dichloride | ≤30 ppm |
Industrial Grade Trifluoromethane(CHF3 ) 99.999%
| Specification | 99.999% |
|---|---|
| Moisture | ≤10 ppm |
| Acidity (as HF) | ≤0.1 ppm |
| Nitrogen | ≤4 ppm |
| Oxygen | ≤1 ppm |
| Carbon Monoxide | ≤0.5 ppm |
| Carbon Dioxide | ≤0.5 ppm |
| Methane | ≤0.5 ppm |
| Other Organics | ≤ 1ppm |
Frequently Asked Questions
