Nitrogen Trifluoride(NF3）
Specifications
- CAS No.: 7783-54-2
- UN No.: 2451
- EINECS No.: 232-007-1
- Molecular Weight: 71.0019 g/mol
- Appearance: Colorless
- Melting Point: -206.79 ℃
- Boiling Point:-129.0℃
- Density: 2.96kg/m³
- Hazard Class (DOT): 2.2 & 8
- Label: Non-flammable Gas
High-purity nitrogen trifluoride (NF₃) gas supplied from China for semiconductor manufacturing, electronics, and specialty applications.
High-purity nitrogen trifluoride (NF₃) for semiconductor chamber cleaning, plasma etching, and flat-panel display manufacturing.
Nitrogen trifluoride is a colorless and odorless gas in its pure form. When mixed with impurity gases, it may appear yellowish with a musty or irritating odor. NF₃ is non-flammable but can support combustion, acting as a strong oxidizing agent at elevated temperatures. It slowly decomposes above 350°C, releasing highly reactive fluorine species. NF₃ serves as a specialized cleaning gas for semiconductor manufacturing equipment (particularly for chemical vapor deposition chamber cleaning), as an etchant in plasma processing, and in the production of flat-panel displays and photovoltaic cells. It is typically transported as a liquefied compressed gas.
Global Shipping & Export Compliance
Nitrogen trifluoride (UN 2451) is classified as a non-flammable compressed gas and must be handled under strict hazardous materials regulations.
- Sea freight (FCL / LCL) – standard export method
- Air freight – available with regulatory compliance
Required Export Documents
- Material Safety Data Sheet (MSDS)
- Certificate of Analysis (COA)
- Dangerous Goods Declaration (DGD)
- UN-certified cylinder documentation
- Commercial invoice & packing list
How to Order Nitrogen Trifluoride Gas from China
- Send technical requirements (purity, cylinder specification, application)
- Receive quotation (EXW / FOB / CIF options)
- Confirm cylinder specification & compliance
- Review COA, MSDS, and certification documents
- Production, filling, and quality inspection
- Hazardous goods shipping arrangement
- Delivery and final inspection at destination
Common Mistakes When Buying Nitrogen Trifluoride Gas
- Choosing suppliers only based on lowest price
- Ignoring cylinder certification and pressure rating
- Not verifying moisture and impurity levels
- Skipping third-party inspection before shipment
- Overlooking export documentation compliance
- Underestimating safety requirements for strong oxidizer handling
Packaging
| Cylinder Capacity | Valve | Weight |
|---|---|---|
| 10L | DISS640 | 4 kgs |
| 47L | DISS640 | 20 kgs |
| 440L | DISS640 | 195 kgs |
Industrial Grade Nitrogen Trifluoride(NF3 ) 99.99%
| Specification | 99.99% |
|---|---|
| Carbon Tetrafluoride | ≤40 ppm |
| Nitrogen | ≤10 ppm |
| Oxygen+Argon | ≤5 ppm |
| Carbon Monoxide | ≤1 ppm |
| Carbon Dioxide | ≤3 ppm |
| Nitrous Oxide | ≤3 ppm |
| Sulfur Hexafluoride | ≤3 ppm |
| Moisture | ≤1 ppm |
| Express as HF | ≤1 ppm |
Industrial Grade Nitrogen Trifluoride(NF3 ) 99.996%
| Specification | 99.996% |
|---|---|
| Carbon Tetrafluoride | ≤20 ppm |
| Nitrogen | ≤5 ppm |
| Oxygen+Argon | ≤3 ppm |
| Carbon Monoxide | ≤1 ppm |
| Carbon Dioxide | ≤0.5 ppm |
| Nitrous Oxide | ≤1 ppm |
| Sulfur Hexafluoride | ≤2 ppm |
| Moisture | ≤1 ppm |
| Express as HF | ≤1 ppm |
Frequently Asked Questions
